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Impact of Environmental Micro-Vibrations on Laser Grooving Machines?

Case|Impact of Environmental Micro-Vibrations on Laser Grooving Machines?

Environmental micro-vibrations can significantly impact high-precision manufacturing equipment. Even minor vibrations may cause laser focus deviations, affecting grooving accuracy. How can we ensure quality operations?

Laser Grooving

Laser grooving is a precision machining method that utilizes high-energy laser beams to process material surfaces. This technology is widely used in semiconductor manufacturing, microelectronics, solar cell production, and other fields requiring high-precision processing.

Applications of Laser Grooving
Semiconductor Manufacturing: Used to create microstructures during wafer processing, such as chip dicing and circuit patterning.
Microelectronics Processing: Fabrication of tiny through-holes and circuit patterns in printed circuit boards (PCBs).
Solar Cell Production: Formation of conductive patterns on solar cells to improve efficiency.
Other Precision Applications: Includes medical devices, aerospace components, and high-precision mechanical parts.

Basic Operating Principle of Laser Grooving
Laser grooving technology focuses high-energy laser beams onto the material surface, causing rapid melting, vaporization, or sublimation under high energy density. This process removes material to create precise grooves. It is typically a non-contact process, avoiding mechanical stress and wear associated with traditional machining.

Basic Operating Principle of Laser Grooving

Challenges of Laser Grooving

Even minor vibrations may cause laser focus deviations, affecting grooving accuracy. This can result in products failing to meet design specifications, reduced machining accuracy, and compromised product performance and reliability. Vibrations can also cause tiny surface ripples or irregularities, increasing surface roughness and affecting the product’s optical or mechanical properties. Frequent micro-vibrations may force machines to operate at lower speeds, directly impacting production efficiency.

Additionally, continuous micro-vibrations can accelerate machine wear and fatigue, shortening its lifespan and increasing maintenance and replacement costs.

Effects of Micro-Vibrations
1. Reduced Processing Accuracy: Micro-vibrations can cause laser focus deviations, affecting grooving precision, leading to dimensional inconsistencies and performance issues.
2. Poor Surface Quality: Vibrations may create tiny surface ripples or irregularities, increasing surface roughness and affecting optical or mechanical performance.
3. Decreased Production Efficiency: Frequent micro-vibrations may force slower machine operation to maintain quality, directly reducing productivity.
4. Shortened Equipment Lifespan: Continuous vibrations can accelerate wear and fatigue, shortening the machine’s lifespan and increasing maintenance costs.

How to Detect Micro-Vibrations?

VMS-PH Dynamic Quality Analyzer
The VMS-PH dynamic analyzer can be used for multi-point measurements across the X, Y, and Z axes simultaneously. By referencing the VC-Curve as the vibration detection standard, it helps understand the relationship between the machine and environmental vibrations.

Measurement Status

CH1 X-axis CH2 Y-axis CH3 Z-axis

Machine On: Op. Theatre X-axis VC-A, Y-axis Op. Theatre, Z-axis VC-A

Machine On: Op. Theatre
X-axis VC-A, Y-axis Op. Theatre, Z-axis VC-A

Machine On with Cart Passing: Op. Theatre X-axis Op. Theatre, Y-axis Residential, Z-axis Residential

Machine On with Cart Passing: Op. Theatre
X-axis Op. Theatre, Y-axis Residential, Z-axis Residential

Cart Passing: VC-A X-axis VC-B, Y-axis VC-A, Z-axis VC-A

Cart Passing: VC-A
X-axis VC-B, Y-axis VC-A, Z-axis VC-A

Machine On: Op. Theatre X-axis Op. Theatre, Y-axis VC-A, Z-axis VC-B

Machine On: Op. Theatre
X-axis Op. Theatre, Y-axis VC-A, Z-axis VC-B

Measurement Conclusion

The highest micro-vibration level measured meets operating room standards, with a process accuracy of 25μm or above, preliminarily conforming to specifications. Using an I-beam structure can reduce the impact of floor vibrations on the machine base. The influence of cart movement on floor micro-vibrations is minimal and can be considered negligible. A nearby machine was detected operating at a rotational frequency of 30Hz (1800rpm), and its second harmonic matches the vibration frequency recorded from the machine. Improvements in micro-vibration levels can be addressed from this aspect.

Environmental micro-vibrations significantly impact high-precision manufacturing equipment. By installing professional vibration isolation equipment and optimizing the working environment, the impact of vibrations can be successfully reduced, leading to a significant improvement in product quality and production efficiency, ensuring machining precision and product reliability.

VMS-PH Dynamic Quality Analyzer
VMS-PH Dynamic Quality Analyzer
VMS-PH Dynamic Quality Analyzer

Accurately identify the root cause of equipment issues.