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How to Ensure the Stability of Coating Equipment in the Coating Process?

Case｜How to Ensure the Stability of Coating Equipment in the Coating Process?

In semiconductor processes, abnormal vibrations during coating deposition can lead to uneven coating. How can equipment measurement help verify process stability?

Coating Methods

Coating methods can generally be categorized into dry coating and wet coating. Wet coating, which does not require a vacuum environment, is more suitable for mass production and is widely used in industrial applications. The coating liquid is evenly applied to the substrate, followed by a drying and curing process to form a solid thin film.

Principle of Spin Coating
Spin coating is a wet coating process where a substrate (such as a silicon wafer or other smooth object) is held in place by vacuum suction. The coating liquid is dispensed at the center of the object, and centrifugal force from spinning evenly distributes the liquid across the surface, expelling excess liquid to form a thin film. Factors such as rotational speed, spin duration, and drying rate affect the thickness of the formed film. If the equipment experiences abnormal vibrations during the process, it can lead to uneven coating.

Solution and Monitoring Explanation

VMS-PH Dynamic Quality Analysis Instrument
Using the dynamic analysis features of VMS-PH, we can measure the operating status of the coating machine and the nozzle rotation speed. By comparing vibration signals at different speeds, we can determine process stability. The system can monitor and diagnose individual operations, helping to identify anomalies or unstable conditions early, enabling predictive maintenance to avoid unexpected failures.